An Electrostatically Driven Torsional Resonator with Two Degrees of Freedom (Part 1) -The Principle and Characteristics of Motion-
スポンサーリンク
概要
- 論文の詳細を見る
- 1997-06-30
著者
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Usuda Takashi
National Research Laboratory Of Metrology
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Usuda Takashi
National Inst. Of Advanced Industrial Sci. And Technol.
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Ueda Akira
National Research Laboratory Of Metrology
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- An Electrostatically Driven Torsional Resonator with Two Degrees of Freedom (Part 1) -The Principle and Characteristics of Motion-