スポンサーリンク
Semiconductor Engineering Dept., Tokyo Shibaura Electric Co., Ltd. | 論文
- Infrared Reflectivity of N on N^+ Si Wafers
- On the Distribution of Impurities in Epitaxial Silicon Films
- Determination of Epitaxial-Layer Impurity Distriburion by Neutron A ctivation Method
- Effect of Heat Treatment on the Infrared Reflectivities of Heavily-Doped N-Type Silicon
- Non-Destructive Determination of Impurity Concentration in Silicon Epitaxial Layer Using Metal-Silicon Schottky Barrier
- Non-Destructive Measurement of Surface Concentrations and Junction Depths of Diffused Semiconductor Layers