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Institut Des Microtechniques De Franche Comte Laboratoire De Mecanique Appliquee Universite De Franc | 論文
- MMT-05 SILICON-BASED FLAPPING WINGS USING SELF-ACTUATED STRESS DISTRIBUTION
- (マイクロマシン)
- Toward New Cylindrical Electrostatic Micromotors Using Tubular Combination of Arrayed Direct-Drive Actuators
- Design and Characterization of High-Torque/Low-Speed Silicon Based Electrostatic Micromotors Using Stator/Rotor Contact Interactions
- Investigation of Output Mechanical Power Limits on High-Torque Electrostatic Actuators Using High-Frequency Complementary Metal Oxide Semiconductor (CMOS) Camera Combined With Image Processing Software : Semiconductors
- On-Chip Investigation of Torque/Speed Characteristics on New High-Torque Micrometer-Size Polysilicon Electrostatic Actuators : Semiconductors
- Toward Standard Method for Microelectromechanical Systems Material Measurement through On-Chip Electrostatic Probing of Micrometer Size Polysilicon Tensile Specimens : Surfaces, Interfaces, and Films