スポンサーリンク
Graduate School of Science, LASTI, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan | 論文
- Fluorinated Diamond-Like Carbon Coating as Antisticking Layer on Nanoimprint Mold
- Temperature Dependence of Release Effect for Antisticking Layer in Nanoimprint Characterized by Scanning Probe Microscopy
- Examination of Focused-Ion-Beam Repair Resolution for UV-Nanoimprint Templates
- Surface Modification of Diamond-like Carbon by Synchrotron Radiation Exposure under the Perfluorohexane Gas Atmosphere
- Surface Evaluation of Fluorinated Diamond-Like Carbon Thin Film as an Antisticking Layer of Nanoimprint Mold