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Device Development Center, Hitachi, Ltd. | 論文
- High-Resolution Wafer Inspection Using the "in-lens SEM" (Special Issue on Scientific ULSI Manufacturing Technology)
- Precise Linewidth Measurement Using a Scanning Electron Probe (Special Issue on Sub-Half Micron Si Device and Process Technologies)
- Design Philosophy of a High Performance BiCMOS Microprocessor
- DFT Timing Design Methodology for Logic BIST(Timing Verification and Test Generation)(VLSI Design and CAD Algorithms)
- DFT Timing Design Methodology for Logic BIST
- Copper Metallization for High-Speed ECL-CMOS LSI's
- Fast Computation of Microscale Temperature Distribution in LSI Chips