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Department Of Opto-mechatronics Faculty Of Systems Engineering Wakayama University | 論文
- Synthesis of Polytetrafluoroethylene-like Films by a Novel Plasma Enhanced Chemical Vapor Deposition Employing Solid Material Evaporation Technique
- Development of Accurate Shape Measurement System Using Multiple Reference Planes(Optical Method 2)
- Low-Coherence Interferometry-Based Non-Contact Temperature Monitoring of a Silicon Water and Chamber Parts during Plasma Etching
- Simultaneous Measurement of Surface Profile and Ultrasonic Transmission Profile by Ultrasonically Vibrated Diamond Tip
- Formation of Patterned Electrode in Ionic Polymer-Metal Composite using Dry Film Photoresist
- Inner Structure / Elastic Modulus Control of Micro Cantilever
- Real-Time Measurement of Nanometer Displacement Distribution by Integrated Phase-Shifting Method(Experimental Mechanics)
- Simultaneous In situ Measurement of Silicon Substrate Temperature and Silicon Dioxide Film Thickness during Plasma Etching of Silicon Dioxide Using Low-Coherence Interferometry
- Simultaneous In situ Measurement of Silicon Substrate Temperature and Silicon Dioxide Film Thickness during Plasma Etching of Silicon Dioxide Using Low-Coherence Interferometry
- Nanometer-Scale Recording on a Superhard and Conductive Carbon Film Using an Atomic Force Microscope