Real-Time Measurement of Nanometer Displacement Distribution by Integrated Phase-Shifting Method(Experimental Mechanics)
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概要
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Phase-shifting methods are advantageous for analyzing phases of fringe patterns obtained by interferometry. Conventional phase-shifting methods usually use three or four images obtained by phase-shifting. If only one camera is used for three or four images, the fringe images are recorded with phase-shifting disruption so that the brightness does not change during the camera exposure time. The stopping procedure obstructs the speed of the measurement system. We proposed a new method that takes four images for phase analysis without disrupting phase-shifting. The method is called the integrated phase-shifting method (IPSM), and is suitable for real-time phase analysis. In this method, four images are recorded continuously with full-exposure time during phase-shifting. In this paper, the development of a real-time phase analysis circuit using this theory and an application to nanometer-order displacement distribution measurement of a micro-accelerometer manufactured by micro-machining techniques are shown.
- 一般社団法人日本機械学会の論文
- 2002-07-15
著者
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Morimoto Yoshiharu
Department Of Opto-mechatronics Faculty Of Systems Engineering Wakayama University
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Morimoto Yoshiharu
Department Of Industrial Engineering Faculty Of Economics Wakayama University
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Fujigaki Motoharu
Department Of Opto-mechatronics Faculty Of Systems Engineering Wakayama University
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Fujigaki Motoharu
Department Of Opto-mechatronics Faculty Of Systems Engineering
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YABE Masato
Graduate School of Systems Engineering, Wakayama University
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Yabe Masato
Graduate School Of Systems Engineering Wakayama University
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