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Department Of Electronics Faculty Of Engineering Nagoya University:(present Address)department Of El | 論文

• The Selective Epitaxial Growth of Silicon by Using Silicon Nitride Film as a Mask
• A New Method for the Epitaxial Growth of Silicon and Its Thermodynamical Analysis
• A Continuous Epitaxial Growth of Silicon by Passing Wafers through a Stational Reactor
• Thermodynamical Analyses and Experiments for the Preparation of Silicon Nitride

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