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2nd Development Department, IC Equipment Division, Nikon Corporation | 論文
- Electron Optics Properties of Electron Beam Stepper
- Symmetric Magnetic Doublet Optics with Dynamically Compensated Field Aberration for Reducing Image Projection System
- Optimization of Object-Image Distance for Aberration and Space-Charge Effect in Symmetric Magnetic Doublet with Dynamically Compensated Field Aberrations
- Secondary Electron Detection Efficiency for Magnetic Lenses with a Retarding Electrostatic Field
- Electron Optics Properties of Electron Beam Stepper