Yamamoto Jun | Process Equipment Engineering Div., Canon Sales Co., Inc.
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概要
Process Equipment Engineering Div., Canon Sales Co., Inc. | 論文
- Ashing Properties in a Surface-Wave Mode Plasma with a Quartz Window
- Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window : Semiconductors
- Oxygen Microwave Plasma Density Enhancement by Surface Waves with a High-Permittivity Material Window
- Effects of Nitrogen Addition to Microwave Oxygen Plasma in Surface Wave with Disk-Plate Window and Photoresist Ashing
- Band-Gap Energy and Effecive Mass of BGaN