Kimura Yosuke | ASM, Tama, Tokyo 206-0025, Japan

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概要

• Kimura Yosukeの詳細を見る
• 同名の論文著者
• ASM, Tama, Tokyo 206-0025, Japanの論文著者

関連著者

• Kobayashi Akiko

  ASM, Tama, Tokyo 206-0025, Japan

• Kobayashi Nobuyoshi

  ASM, Tama, Tokyo 206-0025, Japan

• Kimura Yosuke

  ASM, Tama, Tokyo 206-0025, Japan

• Matsushita Kiyohiro

  ASM, Tama, Tokyo 206-0025, Japan

• Ishikawa Dai

  ASM, Tama, Tokyo 206-0025, Japan

• Nakano Akinori

  ASM, Tama, Tokyo 206-0025, Japan

• Roest David

  ASM, Kapeldreef 75, B-3001 Leuven, Belgium

• Ditmer Gary

  Metryx Ltd., Bristol BS32 4SH, U.K.

• Kiermasz Adrian

  Metryx Ltd., Bristol BS32 4SH, U.K.

著作論文

• Impact of Hydrocarbon Control in Ultraviolet-Assisted Restoration Process for Extremely Porous Plasma Enhanced Chemical Vapor Deposition SiOCH Films with k = 2.0 (Special Issue : Advanced Metallization for ULSI Applications)
• Plasma-Enhanced Atomic Layer Deposition Sealing Property on Extreme Low-k Film with k = 2.0 Quantified by Mass Metrology

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