SHIM Gyu | Department of Electrical Engineering and Computer Science, Nagoya University
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概要
- SHIM Gyu Ilの詳細を見る
- 同名の論文著者
- Department of Electrical Engineering and Computer Science, Nagoya Universityの論文著者
関連著者
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SHIM Gyu
Department of Electrical Engineering and Computer Science, Nagoya University
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Sugai Hideo
Department O Electrical Engineering Nagoya University
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Shim Gyu
Department of Electrical Engineering and Computer Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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YAMAUCHI Takeshi
Corporate Manufacturing Engineering Center, TOSHIBA Corporation
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Yamauchi Takeshi
Corporate Manufacturing Engineering Center Toshiba Corporation
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Ohno Yutaka
Department Of Information Science Faculty Of Engineering Kyoto University
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Kojima Yoshihiro
Department Of Chemistry Graduate School Of Science Hiroshima University
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Kono Satoshi
Department Of Cardiovascular Surgery Nagahama City Hospital
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Ishijima Tatsuo
Plasma Nanotechnology Research Center Nagoya University
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Ishijima Tatsuo
Plasma Nanotechnology Research Center, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Kono Satoshi
Department of Electrical Engineering and Computer Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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SUGAI Hideo
Department of Electronics and Information Engineering, Chubu University
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Ohno Yutaka
Department of Applied Chemistry, Faculty of Engineering, Tohoku University
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SHIM Gyu
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
著作論文
- Dechuck Operation of Coulomb Type and Johnsen-Rahbek Type of Electrostatic Chuck Used in Plasma Processing
- Fabrication of Carbon Nanotubes by Slot-Excited Microwave Plasma-Enhanced Chemical Vapor Deposition
- Plasma Effects on Electrostatic Chuck Characteristics on Capacitive RF Discharge
- Temporal Analysis of Electrostatic Chuck Characteristics in Inductively Coupled Plasma