BAE Sang | Department of Computer Science, Kyonggi University
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概要
Department of Computer Science, Kyonggi University | 論文
- Highly Anisotropic Etching of Tungsten-Nitride for an X-Ray Mask Absorber with an Inductively Coupled Plasma System
- Analysis of Multilayer Structure for Reflection of Extreme-Ultraviolet Wavelength
- Effects of SF_6 Addition to O_2 Plasma on Polyimide Etching
- Study on the Properties of Interlayer Low Dielectric Polyimide during Cl-Based Plasma Etching of Aluminum
- High Transmittance SiC Membrane Prepared by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition in Combination with Rapid Thermal Annealing