Arai Tadashi | ULSI Research Department, Center Research Laboratory, Hitachi, Ltd.

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概要

• Ogata Toshiyukiの詳細を見る
• 同名の論文著者
• ULSI Research Department, Center Research Laboratory, Hitachi, Ltd.の論文著者

ULSI Research Department, Center Research Laboratory, Hitachi, Ltd. | 論文

• Depth Profile and Line-Edge Roughness of Low-Molecular-Weight Amorphous Electron Beam Resists
• Molecular Resists Based on Cholate Derivatives for Electron-Beam Lithography
• Acid-breakable Resin-based Resist for Nanofabrication Electron-beam Lithography
• Molecular Resists Based on Cholate Derivatives for Electron-Beam Lithography

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