SHINCYOUJI Takayuki | Mitsubishi Materials Silicon Corporation
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概要
Mitsubishi Materials Silicon Corporation | 論文
- Simulation of Light Scattering by a Particle on a Film-Coated Substrate Using Coupled-Dipole Method
- Light Scattering by Submicron Particles on Film-Coated Wafers
- A Study of Defect Formation Mechamism at Edges of Local Oxidation of Silicon Structure
- Metal Impurity Trapping Effect by Stress at Edges of Local Oxidation of Silicon Structure
- Stress-Enhanced Diffusion of Boron at the Interface of a Directly Bonded Silicon Wafer