KIM Hyun-Su | Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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- 同名の論文著者
- Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.の論文著者
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd. | 論文
- Flare in Microlithographic Exposure Tools
- Cyclopropyl-containing Photoacid Generators for Chemically Amplified Resists
- Control of Microscratches in Chemical-Mechanical Polishing Process for Shallow Trench Isolation
- 新規強磁性自由層を用いたMRAMの磁化反転ばらつきの改善
- Preparation and Characterization of Iridium Oxide Thin Films by DC Reactive Sputtering