OGURA Atsushi | Silicon Systems Research Laboratories, NEC Corporation

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概要

• OGURA Atsushiの詳細を見る
• 同名の論文著者
• Silicon Systems Research Laboratories, NEC Corporationの論文著者

関連著者

• OGURA Atsushi

  Silicon Systems Research Laboratories, NEC Corporation

• Tajima Michio

  Institute Of Space And Astronautical Scienc

• Ogura Atsushi

  Silicon Systems Research Laboratories Nec Corp.

• Ogura Atsushi

  Silicon System Research Labs., NEC Corp., 1120 Shimokuzawa, Sagamihara 229-1198, Japan

著作論文

• Formation of Buried Oxide Layer in Si Substrates by Oxygen Precipitation at Implantation Damage of Light Ions
• Oxygen Precipitates and Related Defects in SOI Substrate Fabricated by Wafer Bonding and H^+ Splitting

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