YOO Woo | Mattson Technology, Inc.
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概要
Mattson Technology, Inc. | 論文
- Titanium Silicide Formation and Anneal Using a Susceptor-Based Low Pressure Rapid Thermal Processing System
- Highly Reliable, Backside Emissivity Independent Cobalt Silicide Process Using a Susceptor-Based Low Pressure Rapid Thermal Processing System
- Susceptor-Based Rapid Thermal Processing System and Its Silicide Application