スポンサーリンク

Mattson Technology, Inc. | 論文

• Titanium Silicide Formation and Anneal Using a Susceptor-Based Low Pressure Rapid Thermal Processing System
• Highly Reliable, Backside Emissivity Independent Cobalt Silicide Process Using a Susceptor-Based Low Pressure Rapid Thermal Processing System
• Susceptor-Based Rapid Thermal Processing System and Its Silicide Application

スポンサーリンク