Suganuma Shinji | Department of Electronics, Faculty of Engineering, Nagoya University, Furo-cyo, Chikusa-ku, Nagoya 464, Japan

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概要

関連著者

Yamamoto Yasuo
Department Of Chemistry College Of Science Rikkyo University
Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
Shiratani Masaharu
Department Of Electoronics Kyushu University
Ohkura Hiroshi
Department Of Applied Physics Osaka City University
SUGANUMA Shinji
Department of Electronics, Faculty of Engineering, Nagoya University
Fukuzawa Tsuyoshi
Department Of Electronic Device Engineering Graduate School Of Information Science And Electrical En
Watanabe Yukio
Department Of Electrical Engineering Faculty Of Engineering Kyushu University
Shiratani Masaharu
Department of Electronic Device Engineering, Graduate School of Information Science and Electrical Engineering,
GOTO Toshio
Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University
Kawasaki Hiroharu
Department of Electronic Device Engineering, Graduate School of Information Science and Electrical Engineering,
Kawasaki Hiroharu
Department of Electrical and Electronic Engineering, Sasebo National College of Technology, Sasebo, Nagasaki 857-1193, Japan
Fukuzawa Tsuyoshi
Department of Electronic Device Engineering, Graduate School of Information Science and Electrical Engineering,
Suganuma Shinji
Department of Electronics, Faculty of Engineering, Nagoya University, Furo-cyo, Chikusa-ku, Nagoya 464, Japan
Ohkura Hiroshi
Department of Electronic Device Engineering, Graduate School of Information Science and Electrical Engineering,
Goto Toshio
Department of Electronics, Faculty of Engineering, Nagoya University, Furo-cyo, Chikusa-ku, Nagoya 464, Japan
Yamamoto Yasuo
Department of Electronics, Faculty of Engineering, Nagoya University, Furo-cyo, Chikusa-ku, Nagoya 464, Japan

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著作論文

Roles of SiH3 and SiH2 Radicals in Particle Growth in rf Silane Plasmas

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