Saiki Takashi | Fujitsu Ltd., 50 Fuchigami, Akiruno, Tokyo 197-0833, Japan
スポンサーリンク
概要
Fujitsu Ltd., 50 Fuchigami, Akiruno, Tokyo 197-0833, Japan | 論文
- High-Speed Proximity Effect Correction System for Electron-Beam Projection Lithography by Cluster Processing
- Technological Trends of Soft Error Estimation Based on Accurate Estimation Method
- Dependence of Sheet Resistance of CoSi2 with Gate Length of 30 nm on Thickness of Titanium Nitride Capping Layer in Co-Salicide Process
- Dependence of CoSi2 Sheet Resistance on Cobalt Thickness for Gate Lengths of 50 nm or Less
- Advanced Input/Output Technology Using Laterally Modulated Channel Metal–Oxide–Semiconductor Field Effect Transistor for 65-nm Node System on a Chip