Jeong Haedo | Graduate School of Mechanical Engineering, Pusan National University, Busan 609-735, Korea
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- Jeong Haedoの詳細を見る
- 同名の論文著者
- Graduate School of Mechanical Engineering, Pusan National University, Busan 609-735, Koreaの論文著者
関連著者
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Jeong Haedo
Graduate School of Mechanical Engineering, Pusan National University, Busan 609-735, Korea
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JEONG Haedo
Graduate school of Mechanical Engineering, Pusan National University
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Lee Hyunseop
Graduate School of Mechanical Engineering, Pusan National University, Busan 609-735, Korea
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Lee Hyunseop
Department of Precision & Mechanical Engineering, Pusan National University
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Park Boumyoung
Department of Mechanical Engineering, University of California, Berkeley, CA 94720-1740, U.S.A.
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Kim Hyoungjae
Korea Institute of Industrial Technology, Jisa-dong, Gangseo-gu, Busan 618-230, Korea
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Dornfeld David
Department of Mechanical Engineering, University of California, Berkeley, CA 94720-1740, U.S.A.
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Jeong Sukhoon
Graduate School of Mechanical Engineering, Pusan National University, Busan 609-735, Korea
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Joo Sukbae
Graduate School of Mechanical Engineering, Pusan National University, San 30, Changjeon-dong, Kumjeong-gu, Busan 609-735, Korea
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Kim Hyoungjae
Busan R&D Center, Korea Institute of Industrial Technology, #208, BS-DITIC, 1274 Jisa-dong, Gangseo-gu, Busan 618-230, Korea
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Kim Hyoungjae
Korea Institute of Industrial Technology, Busan 618-230, Korea
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Kim Hyoungjae
Busan R&D Center, Korea Institute of Industrial Technology, #208, BS-DITIC, 1274 Jisa-dong, Gangseo-gu, Busan 618-230, Korea
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Park Kihyun
Graduate School of Mechanical Engineering, Pusan National University, Busan 609-735, Korea
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Oh Jiheon
Graduate School of Interdisciplinary Program in Hybrid Materials Solution, Pusan National University, Busan 609-735, Korea
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Lee Hyunseop
Graduate School of Mechanical Engineering, Pusan National University, San 30, Changjeon-dong, Kumjeong-gu, Busan 609-735, Korea
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LEE Youngkyun
Graduate school of Mechanical Engineering, Pusan National University
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JEONG Hobin
Graduate school of Mechanical Engineering, Pusan National University
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CHOI Sungha
Graduate school of Mechanical Engineering, Pusan National University
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LEE Hyunseop
Department of Mechanical Engineering, University of California, Berkley
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Jeong Haedo
Graduate School of Mechanical Engineering, Pusan National University, San 30, Changjeon-dong, Kumjeong-gu, Busan 609-735, Korea
著作論文
- Experimental Investigation of Material Removal Characteristics in Silicon Chemical Mechanical Polishing
- Prediction of Real Contact Area from Microtopography on CMP Pad
- Chemical Mechanical Planarization Method for Thick Copper Films of Micro-Electro-Mechanical Systems and Integrated Circuits
- Pad Characterization and Experimental Analysis of Pad Wear Effect on Material Removal Uniformity in Chemical Mechanical Polishing