Lee Hyunseop | Department of Precision & Mechanical Engineering, Pusan National University
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概要
関連著者
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Lee Hyunseop
Department of Precision & Mechanical Engineering, Pusan National University
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Jeong Haedo
School Of Mechanical Engineering Pusan National University
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Park Boumyoung
Department of Mechanical Engineering, University of California, Berkeley, CA 94720-1740, U.S.A.
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Park Boumyoung
Department of Precision & Mechanical Engineering, Pusan National University
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Kim Hyoungjae
Department of Mechanical Engineering, University of California
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Seo Heondeok
Department of Precision & Mechanical Engineering, Pusan National University
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Jeong Haedo
School of Mechanical Engineering, Pusan National University
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Seo Heondeok
Department Of Precision & Mechanical Engineering Pusan National University
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Lee Hyunseop
Department Of Precision & Mechanical Engineering Pusan National University
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Kim Hyoungjae
Department Of Mechanical Engineering University Of California
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Park Boumyoung
Department Of Precision & Mechanical Engineering Pusan National University
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Kim Youngjin
Department Of Energy And Resources Engineering Kangwon National University
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Park Boumyoung
Department of Precision and Mechanical Engineering, Pusan National University, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Korea
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Kim Hyoungjae
Korea Institute of Industrial Technology, Jisa-dong, Gangseo-gu, Busan 618-230, Korea
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Jeong Haedo
Graduate School of Mechanical Engineering, Pusan National University, Busan 609-735, Korea
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Kim Hyoungjae
Korea Institute of Industrial Technology, Busan 618-230, Korea
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Kim Youngjin
Department of Precision and Mechanical Engineering, Pusan National University, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Korea
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LEE Youngkyun
Graduate school of Mechanical Engineering, Pusan National University
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JEONG Hobin
Graduate school of Mechanical Engineering, Pusan National University
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CHOI Sungha
Graduate school of Mechanical Engineering, Pusan National University
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LEE Hyunseop
Department of Mechanical Engineering, University of California, Berkley
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JEONG Haedo
Graduate school of Mechanical Engineering, Pusan National University
著作論文
- Tribological Effect of Abrasives on Material Removal in Oxide CMP(Surface and edge finishing)
- Effect of Process Parameters on Friction Force and Material Removal in Oxide Chemical Mechanical Polishing
- Prediction of Real Contact Area from Microtopography on CMP Pad