Takao Yoshinori | Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Kyoto 606-8501, Japan
スポンサーリンク
概要
- Takao Yoshinoriの詳細を見る
- 同名の論文著者
- Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Kyoto 606-8501, Japanの論文著者
関連著者
-
Eriguchi Koji
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
-
Takao Yoshinori
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
-
TSUDA Hirotaka
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University
-
Ono Kouichi
Department Of Aeronautical Engineering Faculty Of Engineering Kyoto University
-
Takao Yoshinori
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Kyoto 606-8501, Japan
-
Ono Kouichi
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Kyoto 606-8501, Japan
-
Tsuda Hirotaka
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Kyoto 606-8501, Japan
-
Miyata Hiroki
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Kyoto 606-8501, Japan
著作論文
- Three-Dimensional Atomic-Scale Cellular Model and Feature Profile Evolution during Si Etching in Chlorine-Based Plasmas: Analysis of Profile Anomalies and Surface Roughness
- Modeling and Simulation of Nanoscale Surface Rippling during Plasma Etching of Si under Oblique Ion Incidence