King Deanna | Department of Chemical and Environmental Engineering, University of Arizona

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概要

• 同名の論文著者
• Department of Chemical and Environmental Engineering, University of Arizonaの論文著者

Department of Chemical and Environmental Engineering, University of Arizona | 論文

• Impact of Wafer Geometry and Thermal History on Pressure and von Mises Stress Non-Uniformity During Chemical Mechanical Planarization
• Impact of Wafer Geometry and Thermal History on Pressure and von Mises Stress Non-Uniformity During Chemical Mechanical Planarization
• Characterization of Slurry Residues in Pad Grooves for Diamond Disc and High Pressure Micro Jet Pad Conditioning Processes
• Theoretical and Experimental Investigation of Conditioner Design Factors on Tribology and Removal Rate in Copper Chemical Mechanical Planarization
• Analysis of Formation of Pad Stains in Copper Chemical Mechanical Planarization

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