Sadamitsu Shinsuke | Silicon Technology R&D Center, Sumitomo Sitix Corporation
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概要
Silicon Technology R&D Center, Sumitomo Sitix Corporation | 論文
- Relationship between Grown-in Defects in Czochralski Silicon Crystals
- Influence of Crystal-Originated "Particle" Microstructure on Silicon Wafers on Gate Oxide Integrity
- Influence of Fe Contamination in Czochralski-Grown Silicon Single Crystals on LSI-Yield Related Crystal Quality Characteristics
- Efficiency of Boron Getterimg for Iron Irmpurities in p/p^+ Epitaxial Silicon Wafers
- Microstructure Observation of "Crystal-Originated Particles" on Silicon Wafers