石井 信雄 | Tokyo Electron Ltd.
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概要
Tokyo Electron Ltd. | 論文
- Temperature-Measurement System Using Optical Fiber-Type Low-Coherence Interferometry for MultiLayered Substrate
- Production of Low-Electron-Temperature Electron Cyclotron Resonance Plasma Using Nitrogen Gas in the Mirror Magnetic Field
- 1-GHz Bandwidth Digital Spectro-Correlator System for the Nobeyama Millimeter Array
- Nitrogen Profile Study for SiON Gate Dielectrics of Advanced DRAM
- Characterization of Ultra Thin Oxynitride Formed by Radical Nitridation with Slot Plane Antenna Plasma