Kuba Yukio | Crestec Corporation, Hachioji, Tokyo 192-0045, Japan
スポンサーリンク
概要
関連著者
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OHYI Hideyuki
CRESTEC
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Kuba Yukio
Crestec Corporation, Hachioji, Tokyo 192-0045, Japan
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KOBAYASHI Kazuhiko
CRESTEC
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MIYAZAKI Takeshi
CRESTEC
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Kobayashi Kazuhiko
Crestec Corporation, Hachioji, Tokyo 192-0045, Japan
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Hayashi Kunito
Crestec Corporation, Hachioji, Tokyo 192-0045, Japan
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Morita Hisayuki
Crestec Corporation, Hachioji, Tokyo 192-0045, Japan
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Nita Hideyuki
Crestec Corporation, Hachioji, Tokyo 192-0045, Japan
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Okino Teruaki
Crestec Corporation, Hachioji, Tokyo 192-0045, Japan
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Shibata Masahiro
Crestec Corporation, Hachioji, Tokyo 192-0045, Japan
著作論文
- Continuous-Stage-Movement Blankingless Electron-Beam Lithography for Patterned Media Template Fabrication
- 130 kV High-Resolution Electron Beam Lithography System for Sub-10-nm Nanofabrication