SAITO Shinobu | System Devices Research Laboratories, NEC

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• SAITO Shinobuの詳細を見る
• 同名の論文著者
• System Devices Research Laboratories, NECの論文著者

System Devices Research Laboratories, NEC | 論文

• High Performance SiN-MIM Decoupling Capacitors with Surface-smoothed Bottom Electrodes for High-speed MPUs
• A Metallurgical Prescription Suppressing Stress-induced Voiding (SIV) in Cu lines
• Characterization of Ferroelectric Domain Behavior in MOCVD-PZT Capacitors for CMVP FeRAMs
• Mechanical Property Control of Low-k Dielectrics for Diminishing Chemical Mechanical Polishing (CMP)-Related Defects in Cu-Damascene Interconnects
• Surface Control of Bottom Electrode in Ultra-Thin SiN Metal–Insulator–Metal Decoupling Capacitors for High Speed Processors

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