MIKAMI Noboru | MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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概要
MIRAI, Association of Super-Advanced Electronics Technologies (ASET) | 論文
- Molecular Orbital Calculation of the Elastic Modulus and the Dielectric Constant for Ultra Low-k Organic Polymers
- Theoretical Investigation of Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films with Elliptical Cylindrical Pores
- Theoretical Analysis of Elastic Modulus and Dielectric Constant for Low-k Two-Dimensional Periodic Porous Silica Films
- Theoretical Investigation into Effects of Pore Size and Pore Position Distributions on Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films
- Role of Frictional Force on the Polishing Rate of Cu Chemical Mechanical Polishing