Takayuki Ohba | School of Engineering, the University of Tokyo, 2-11-16 Yayoi, Bunkyo, Tokyo 113-8656, Japan
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概要
- Takayuki Ohba の詳細を見る
- 同名の論文著者
- School of Engineering, the University of Tokyo, 2-11-16 Yayoi, Bunkyo, Tokyo 113-8656, Japanの論文著者
関連著者
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Takayuki Ohba
School of Engineering, the University of Tokyo, 2-11-16 Yayoi, Bunkyo, Tokyo 113-8656, Japan
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Atsushi Ogura
School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Seiichi Kondo
Semiconductor Leading Edge Technologies, Inc., 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
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Hideki Kitada
School of Engineering, the University of Tokyo, 2-11-16 Yayoi, Bunkyo, Tokyo 113-8656, Japan
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Tominaga Shigeru
Roki Techno Co., Ltd., 6-20-12 Minami-Oi, Shinagawa, Tokyo 140-8576, Japan
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Abe Daisuke
Roki Techno Co., Ltd., 6-20-12 Minami-Oi, Shinagawa, Tokyo 140-8576, Japan
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Enomoto Taro
Roki Techno Co., Ltd., 6-20-12 Minami-Oi, Shinagawa, Tokyo 140-8576, Japan
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Shigeru Tominaga
Roki Techno Co., Ltd., 6-20-12 Minami-Oi, Shinagawa, Tokyo 140-8576, Japan
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Daisuke Abe
Roki Techno Co., Ltd., 6-20-12 Minami-Oi, Shinagawa, Tokyo 140-8576, Japan
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Yoshio Ohshita
Toyota Technological Institute, 2-12-1 Hisakata, Tempaku, Nagoya 468-8511, Japan
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Taro Enomoto
Roki Techno Co., Ltd., 6-20-12 Minami-Oi, Shinagawa, Tokyo 140-8576, Japan
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Seiichi Kondo
Semiconductor Leading Edge Technologies, Inc. (Selete), 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
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Masato Ishikawa
Gas-phase Growth Ltd., Koganei, Tokyo 184-0012, Japan
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Takayuki Ohba
School of Engineering, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan
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Hideaki Machida
Gas-phase Growth Ltd., Koganei, Tokyo 184-0012, Japan
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Seichi Hamada
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Takafumi Horiike
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Yoshio Ohshita
Toyota Technological Institute, Nagoya 468-8511, Japan
著作論文
- Hybrid Electrochemical Mechanical Planarization Process for Cu Dual-Damascene Through-Silicon Via Using Noncontact Electrode Pad
- Chemical Vapor Deposition of GeSbTe Thin Films for Next-Generation Phase Change Memory