Shamiryan Denis | IMEC and Electrical Engineering Department of Catholic University of Leuven, Belgium

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概要

• Shamiryan Denisの詳細を見る
• 同名の論文著者
• IMEC and Electrical Engineering Department of Catholic University of Leuven, Belgiumの論文著者

関連著者

• Shamiryan Denis

  IMEC and Electrical Engineering Department of Catholic University of Leuven, Belgium

• Richard Olivier

  imec v.z.w., Kapeldreef 75, B-3001 Leuven, Belgium

• de Marneffe

  imec v.z.w., Kapeldreef 75, B-3001 Leuven, Belgium

• Lazzarino Frederic

  imec v.z.w., Kapeldreef 75, B-3001 Leuven, Belgium

• Goossens Danny

  imec v.z.w., Kapeldreef 75, B-3001 Leuven, Belgium

• Vandervorst Alain

  imec v.z.w., Kapeldreef 75, B-3001 Leuven, Belgium

• Shamiryan Denis

  imec v.z.w., Kapeldreef 75, B-3001 Leuven, Belgium

• Xu Kaidong

  imec v.z.w., Kapeldreef 75, B-3001 Leuven, Belgium

• Truffert Vincent

  imec v.z.w., Kapeldreef 75, B-3001 Leuven, Belgium

• Boullart Werner

  imec v.z.w., Kapeldreef 75, B-3001 Leuven, Belgium

• Marneffe Jean-Fran\{c}ois

  imec v.z.w., Kapeldreef 75, B-3001 Leuven, Belgium

• Shamiryan Denis

  IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium

• Mogilnikov Konstantin

  Interuniversity Microelectronic Center (IMEC), Leuven, Belgium

• Baklanov Mikhail

  Interuniversity Microelectronic Center (IMEC), Leuven, Belgium

• Petkov Mihail

  Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA, USA

• Phillips Mark

  SBA Materials, Inc., 9430-H San Mateo Blvd, NE Albuquerque, NM 87113, U.S.A.

• Verdonck Patrick

  IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium

• Smirnov Evgeny

  IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium

• Vanstreels Kris

  IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium

• Ciofi Ivan

  IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium

• Baklanov Mikhail

  IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium

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著作論文

• Patterning of 25 nm Contact Holes at 90 nm Pitch: Combination of Line/Space Double Exposure Immersion Lithography and Plasma-Assisted Shrink Technology
• Evaluation of a New Advanced Low-$k$ Material
• A Discussion of the Practical Importance of Positron Annihilation Lifetime Spectroscopy Percolation Threshold in Evaluation of Porous Low-$K$ Dielectrics

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