Kyuragi H. | Ntt System Electronics Laboratories
スポンサーリンク
概要
関連著者
-
Kyuragi H.
Ntt System Electronics Laboratories
-
HIRATA A.
NTT System Electronics Laboratories
-
MACHIDA K.
NTT System Electronics Laboratories
-
AWAYA N.
NTT System Electronics Laboratories
-
MAEDA M.
NTT System Electronics Laboratories
-
MAEYAMA S.
NTT Basic Research Laboratories
-
WATANABE Y.
NTT Basic Research Laboratories
著作論文
- WSiN Diffusion Barrier Formed by ECR Plasma Nitridation for Copper Damascene Interconnection
- Improved Diffusion Barrier Capability of Thin WSiN Film by RF Bias Application during ECR Plasma Nitridation