Awano Y | Mirai-selete (semiconductor Leading Edge Technologies Inc.)
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概要
Mirai-selete (semiconductor Leading Edge Technologies Inc.) | 論文
- Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition
- Electrical properties of carbon nanotubes grown at a low temperature by radical chemical vapor deposition for future LSI interconnects
- Carbon Nanotube Via Technologies for Advanced Interconnect Integration
- High-Current Reliability of Carbon Nanotube Via Interconnects
- Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition