NAKANO M. | Central Research Laboratories, Sharp Corporation

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概要

• 同名の論文著者
• Central Research Laboratories, Sharp Corporationの論文著者

関連著者

• KAKIMOTO S.

  Advanced Technology Research Laboratories, Sharp Corporation

• Kakimoto S.

  Advanced Technology Research Laboratories Sharp Corporation

• Kotaki H.

  Advanced Technology Research Laboratories Sharp Corporation

• NAKANO M.

  Central Research Laboratories, Sharp Corporation

• KOTAKI H.

  Central Research Laboratories, Sharp Corporation

• KAKIMOTO S.

  Central Research Laboratories, Sharp Corporation

• KATAOKA K.

  Central Research Laboratories, Sharp Corporation

• HAYASHIDA S.

  Central Research Laboratories, Sharp Corporation

• MATSUOKA T.

  Central Research Laboratories, Sharp Corporation

• NAKANO A.

  Analysis Center, (IC) Group, Sharp Corporation

• UDA K.

  Central Research Laboratories, Sharp Corporation

• SATO Y.

  Central Research Laboratories, Sharp Corporation

• Uda K.

  Central Research Laboratories Sharp Corporation

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著作論文

• Novel Ultra Clean Salicide Technology Using Double Titanium Deposited Silicide (DTD) Process for 0.1μm Gate Electrode
• Novel Low Leakage and Low Resistance Titanium Salicide Technology with Recoil Nitrogen Achieved by Silicidation after Ion Implantation through Contamination-Restrained Oxygen Free LPCVD-Nitride Layer (SICRON)

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