Lee Youngjin | R&D Division, Hynix Semiconductor Inc., San 136-1, Ami-ri, Bubal-eup, Icheon-si, Kyoungi-do 467-701,

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概要

関連著者

Jeon Hyeongtag
Division Of Materials Science & Engineering Hanyang University
Lee Youngjin
R&d Division Hynix Semiconductor Inc.
Kim Keunjun
Division of Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea
Lee Keunwoo
Division of Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea
Han Sejin
Division of Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea
Park Taeyong
Division of Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea
Lee Youngjin
R&D Division, Hynix Semiconductor Inc., San 136-1, Ami-ri, Bubal-eup, Icheon-si, Kyoungi-do 467-701,
Kim Jeongtae
R&D Division, Hynix Semiconductor Inc., San 136-1, Ami-ri, Bubal-eup, Icheon-si, Kyoungi-do 467-701,
Yeom Seungjin
R&D Division, Hynix Semiconductor Inc., San 136-1, Ami-ri, Bubal-eup, Icheon-si, Kyoungi-do 467-701,
Kim Keunjun
Division Of Materials Science And Engineering Hanyang University
Park Taeyong
Division Of Materials Science And Engineering Hanyang University
Yeom Seungjin
R&d Division Hynix Semiconductor Inc.
Lee Keunwoo
Division Of Materials Science And Engineering Hanyang University
Han Sejin
Division Of Materials Science And Engineering Hanyang University

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著作論文

Comparison of Co Films Deposited by Remote Plasma Atomic Layer Deposition Method with Cyclopentadienylcobalt Dicarbonyl [CpCo(CO)_2] and Dicobalt Octacarbonyl [Co_2(CO)_8]

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