Shimokawa Kimiaki | Vlsi R&d Center Oki Electric Industry Company Ltd.
スポンサーリンク
概要
関連著者
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Yoshimaru Masaki
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Usami Takashi
Vlsi R&d Center Oki Electric Industry Company Ltd.
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Shimokawa Kimiaki
VLSI R&D Center, OKI Electric Industry Company, Ltd.
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Shimokawa Kimiaki
Vlsi R&d Center Oki Electric Industry Company Ltd.
著作論文
- Water Desorption Control of Interlayer Dielectrics to Reduce MOSFET Hot Carrier Degradation (Special Issue on Quarter Micron Si Device and Process Technologies)
- Low Dielectric Constant Interlayer Using Fluorine-Doped Silicon Oxide