Shimokawa Kimiaki | VLSI R&D Center, OKI Electric Industry Company, Ltd.

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概要

• 同名の論文著者
• VLSI R&D Center, OKI Electric Industry Company, Ltd.の論文著者

関連著者

• Yoshimaru Masaki

  Vlsi R&d Center Oki Electric Industry Co. Ltd.

• Usami Takashi

  Vlsi R&ampd Center Oki Electric Industry Company Ltd.

• Shimokawa Kimiaki

  VLSI R&D Center, OKI Electric Industry Company, Ltd.

• Shimokawa Kimiaki

  Vlsi R&ampd Center Oki Electric Industry Company Ltd.

著作論文

• Water Desorption Control of Interlayer Dielectrics to Reduce MOSFET Hot Carrier Degradation (Special Issue on Quarter Micron Si Device and Process Technologies)
• Low Dielectric Constant Interlayer Using Fluorine-Doped Silicon Oxide

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