Kakinuma Shigeru | Horiba Ltd.
スポンサーリンク
概要
関連著者
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Naka Nobuyuki
Horiba Ltd.
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Kodera Masako
Process & Manufacturing Engineering Center Toshiba Corp.
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Tsuchiya Norihiko
Process And Manufacturing Engineering Center Toshiba Semiconductor Company
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Iguchi Tadashi
Process And Manufacturing Engineering Center Toshiba Semiconductor Company
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TAMURA Mizuki
Toshiba I. S. Corp.
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Kashiwagi Shinsuke
Horiba Ltd.
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Kakinuma Shigeru
Horiba Ltd.
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KAKINUMA Shigeru
Horiba, Ltd.
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KASHIWAGI Shinsuke
Horiba, Ltd.
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Naka Nobuyuki
HORIBA, Ltd., 2 Miyanohigashi, Kisshoin, Minami-ku, Kyoto 601-8510, Japan
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Iguchi Tadashi
Process and Manufacturing Engineering Center, Toshiba Semiconductor Company, 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan
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Kashiwagi Shinsuke
HORIBA, Ltd., 2 Miyanohigashi, Kisshoin, Minami-ku, Kyoto 601-8510, Japan
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Kakinuma Shigeru
HORIBA, Ltd., 2 Miyanohigashi, Kisshoin, Minami-ku, Kyoto 601-8510, Japan
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Kodera Masako
Process and Manufacturing Engineering Center, Toshiba Semiconductor Company, 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan
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Tamura Mizuki
Toshiba I. S. Corp., 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan
著作論文
- Nano-Scale Stress Field Evaluation with Shallow Trench Isolation Structure Assessed by Cathodoluminescence, Raman Spectroscopy, and Finite Element Method Analyses
- Nanoscale Stress Field Evaluation with Shallow Trench Isolation Structure Assessed by Cathodoluminescence Spectroscopy, Raman Spectroscopy, and Finite Element Method Analyses