Uchida Hidetsugu | Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
スポンサーリンク
概要
Vlsi Research And Development Center Oki Electric Industry Co. Ltd. | 論文
- Mechanical Effects of Hafnium and Boron Addition to Aluminum Alloy Films for Submicrometer LSI Interconnects
- Cross-sectional Transmission Electron Microscope Studies on Intrinsic Breakdown Spots of Thin Gate Oxides
- Mechanisms of Surface Reaction in Fluorocarbon Dry Etching of Silicon Dioxide : An Effect of Thermal Excitation
- Step Edge Structures on Si(112) and (113) Surfaces Treated in NH_4F Solution
- Effect of Stress on Oxide Edge Shape of Local Oxidation of Silicon for Various Oxidation Temperatures