Tsuchino Akio | Department of Electronics, Kyoto University, Yoshida Honmachi, Sakyo-Ku, Kyoto 606-8501, Japan

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概要

関連著者

Tachibana Kunihide
Department Of Electronic Science And Engineering Kyoto University
Tachibana Kunihide
Department Of Electronics Kyoto University
Nakamura Toshihiro
Department Of Anesthesiology Yamanashi Medical University
Shirafuji Tatsuru
International Innovation Center, Kyoto University, Yoshida Honmachi, Sakyo-Ku, Kyoto 606-8501, Japan
Tsuchino Akio
Department of Electronics, Kyoto University, Yoshida Honmachi, Sakyo-Ku, Kyoto 606-8501, Japan
Tsuchino Akio
Department Of Electronics Kyoto University
Shirafuji Tatsuru
International Innovation Center Kyoto University

著作論文

Plasma Copolymerization of C6F6/C5F8 for Application of Low-Dielectric-Constant Fluorinated Amorphous Carbon Films and Its Gas-Phase Diagnostics Using In Situ Fourier Transform Infrared Spectroscopy

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