Syed Moniruzzaman | Department Of Electronics Faculty Of Technology Kanazawa University
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概要
関連著者
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Inokuma T
Department Of Electronics Faculty Of Technology Kanazawa University
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Inokuma Takao
Department Of Electronics Kanazawa University
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Inokuma Takao
Department Of Electronics Faculty Of Technology Kanazawa University
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HASEGAWA Seiichi
Department of Electronics, Faculty of Technology, Kanazawa University
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KURATA Yoshihiro
Department of Electronics, Faculty of Technology, Kanazawa University
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SYED Moniruzzaman
Department of Electronics, Faculty of Technology, Kanazawa University
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Kurata Y
Precision Technology Development Center Sharp Corporation
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Hasegawa Seiichi
Department Of Electronics Faculty Of Technology Kanazawa University
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Kurata Yoshihiro
Department Of Electronics Faculty Of Technology Kanazawa University
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Syed Moniruzzaman
Department Of Electronics Faculty Of Technology Kanazawa University
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Hasegawa Seiichi
Department Of Electrical And Computer Engineering Faculty Of Technology Kanazawa University
著作論文
- Effects of Plasma-Pretreatment on Substrates before Deposition of Polycrystalline Silicon Films(Surfaces, Interfaces, and Films)
- Temperature Effects on the Structure of Polycrystalline Silicon Films by Glow-Discharge Decomposition Using SiH_4/SiF_4
- Effects of the Addition of SiF_4 to the SiH_4 Feed Gas for Depositing Polycrystalline Silicon Films at Low Temperature