Murakami K | Kyushu Electronic Metal Co. Ltd
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概要
Kyushu Electronic Metal Co. Ltd | 論文
- Transmission Electron Microscopy Observation of Defects Induced by Fe Contamination on Si(100) Surface
- A Method of Quantitative Contamination with Metallic Impurities of the Surface of a Silicon Wafer : Semiconductors and Semiconductor Devices
- Degradation of Gate Oxide Integrity by Metal Impurities
- Influence of Metal Impurities on Leakage Current of Si N^+ P Diode
- Dependence of Gettering Efficiency on Metal Impurities