KIM Sang | GASONICS International
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概要
関連著者
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Emami Alan
Gasonics International
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KIM Sang
GASONICS International
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Deleonibus Simon
Lei(cea) Depth De Microelectronique
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Leroux Charles
Leti(cea) Departement De Microelectronique
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HEITZMANN Michel
LETI(CEA), Dept de Microelectronique
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MARTIN Francois
LETI(CEA), Dept de Microelectronique
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DELEONIBUS Simon
LETI(CEA) Departement de Microelectronique
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FLORIN Brigitte
LETI(CEA) Departement de Microelectronique
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Martin Francois
Leti(cea) Dept De Microelectronique
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Heitzmann Michel
Leti(cea) Dept De Microelectronique
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Mathews Viju
Micron Technology Inc.
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Fazan Pierre
Micron Technology Inc.
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JENG Nanseng
Micron Technology, Inc.
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Jeng Nanseng
Micron Technology Inc.
著作論文
- High Pressure High Temperature Steam Oxidation Poly Buffer LOCOS (HP-HTPBL) Field Isolation Process for Reduced Encroachment and Low Stress
- Dry O_2 High Pressure Field Oxidation for 0.25μm Isolation Technology