HEITZMANN Michel | LETI(CEA), Dept de Microelectronique

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概要

• 同名の論文著者
• LETI(CEA), Dept de Microelectroniqueの論文著者

関連著者

• Deleonibus Simon

  Lei(cea) Depth De Microelectronique

• HEITZMANN Michel

  LETI(CEA), Dept de Microelectronique

• MARTIN Francois

  LETI(CEA), Dept de Microelectronique

• Martin Francois

  Leti(cea) Dept De Microelectronique

• Heitzmann Michel

  Leti(cea) Dept De Microelectronique

• Toffoli Alain

  Leti(cea) Dept De Microelectronique

• Leroux Charles

  Leti(cea) Departement De Microelectronique

• Emami Alan

  Gasonics International

• GOBIL Yveline

  LETI(CEA), Dept de Microelectronique

• DEMOLLIENS Olivier

  LETI(CEA), Dept de Microelectronique

• GUIBERT Jean-Charles

  LETI(CEA), Dept de Microelectronique

• Gobil Yveline

  Leti(cea) Dept De Microelectronique

• DELEONIBUS Simon

  LETI(CEA) Departement de Microelectronique

• KIM Sang

  GASONICS International

• FLORIN Brigitte

  LETI(CEA) Departement de Microelectronique

• Demolliens Olivier

  Leti(cea) Dept De Microelectronique

• Guibert Jean-charles

  Leti(cea) Dept De Microelectronique

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著作論文

• Differential Body Effect Analysis and Optimization of the LArge Tilt Implanted Sloped Shallow Trench Isolation Process (LATI-STI)
• High Pressure High Temperature Steam Oxidation Poly Buffer LOCOS (HP-HTPBL) Field Isolation Process for Reduced Encroachment and Low Stress

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