Tarumi Nobuaki | Semiconductor Leading Edge Technologies Inc.
スポンサーリンク
概要
関連著者
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Ogawa Shinichi
Semiconductor Leading Edge Technologies Inc.
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Tarumi Nobuaki
Semiconductor Leading Edge Technologies Inc.
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Soda Eiichi
Semiconductor Leading Edge Technologies Inc.
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NAMBA Kunitoshi
Semiconductor Leading Edge Technologies, Inc.
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HOSOI Nobuki
Semiconductor Leading Edge Technologies, Inc.
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TARUMI Nobuaki
Semiconductor Leading Edge Technologies, Inc.
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SHINRIKI Hiroshi
ASM Japan K.K.
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Hosoi Nobuki
Semiconductor Leading Edge Technologies Inc.
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Namba Kunitoshi
Semiconductor Leading Edge Technologies Inc.
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Shiohara Morio
Semiconductor Leading Edge Technologies, Inc. (Selete), 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
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Takigawa Yukio
Semiconductor Leading Edge Technologies, Inc., Tsukuba, Ibaraki 305-8569, Japan
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Oda Noriaki
Semiconductor Leading Edge Technologies, Inc., 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
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Takigawa Yukio
Semiconductor Leading Edge Technologies, Inc., 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
著作論文
- Plasma-Enhanced ALD Ru Thin Films on PVD-TaN Films with Smooth Morphology at Low Temperature Using DER Ru Precursor
- Novel Air-gap Formation Technology Using Ru Barrier Metal for Cu Interconnects with High Reliability and Low Capacitance