Kim Yun-sang | Trikon Technologies
スポンサーリンク
概要
関連著者
-
Kim Yun-sang
Trikon Technologies
-
Tynan George
Trikon Technologies
-
Song Chi-wha
Hyundai Electronics Industries Co. Ltd.
-
Wei Peter
Trikon Technologies Inc.:(present Address) Dept. Chemical Engineering Chun-yuan Unversity
-
Ji Ho-yeon
Trikon Technologies Inc.
-
KIM Yun-Sang
Trikon Technologies, Inc.
-
CHARATAN Robert
Trikon Technologies, Inc.
-
HEMKER Dave
Trikon Technologies, Inc.
-
Hemker Dave
Trikon Technologies Inc.
-
Kim Yun-sang
Trikon Technologies Inc.:applied Materials Inc.
-
Kim Yun-sang
Trikon Technologies Inc.
-
HAN Kyo-Sik
Trikon Technologies, Inc.
-
Charatan Robert
Trikon Technologies Inc.
-
Han Kyo-sik
Trikon Technologies Inc.:gasonics International Korea
-
RAMPERSAD Regan
Trikon Technologies
-
Kim Yun-San
Trikon Technologies
著作論文
- Selective Plasma Etching for High-Aspect-Ratio Oxide Contact Holes
- Secondary Corrosion of Aluminum Alloy Due to Residual Sidewall and Its Removal Using M=0 Helicon Plasma Reactor
- The Effect of BCl_3 Addition on RUO_2 Etching in M = 0 Helicon Reactor