Toda Takeshi | Device Platforms Research Labs. Nec.
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概要
Device Platforms Research Labs. Nec. | 論文
- High Performance SiN-MIM Decoupling Capacitors with Surface-smoothed Bottom Electrodes for High-speed MPUs
- Impact of Barrier Metal Sputtering on Low-k SiOCH Films with Various Chemical Structures
- A Metallurgical Prescription Suppressing Stress-induced Voiding (SIV) in Cu lines
- Mechanical Property Control of Low-k Dielectrics for Diminishing Chemical Mechanical Polishing (CMP)-Related Defects in Cu-Damascene Interconnects
- A Small Area, 3-Dimensional On-chip Inductors for High-speed Signal Processing under Low Power Supply Voltages