Kuo Yue | Ibm Reseach Division T.j.watson Rsearch Center
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概要
関連著者
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Kuo Yue
Ibm Reseach Division T.j.watson Rsearch Center
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KUO Yue
IBM Research Division, T. J. Watson Research Center
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Kuo Y
Texas A&m Univ. Tx Usa
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Kuo Yue
Ibm Research Division T. J Watson Research Center
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Kuo Yue
Ibm Research Division T. J. Watson Research Center
著作論文
- Reactive Ion Etching of Sputter Deposited Tantalum with CF_4, CF_3Cl, and CHF_3
- Characterization of Indium Tin Oxide and Reactive Ion Etched Indium Tin Oxide Surfaces
- Characterization of Indium Tin Oxide and Reactive Ion Etched Indium Tin Oxide Surfaces : Etching and Deposition Technology
- Plasma Swelling of Photoresist