Yamamoto Masashi | Kanazawa Inst. Technol. Ishikawa Jpn
スポンサーリンク
概要
関連著者
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Yamamoto Masashi
Kanazawa Inst. Technol. Ishikawa Jpn
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MARUOKA Takeshi
Kanazawa Institute of Technology
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UMEMOTO Hironobu
Shizuoka University
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Horibe Hideo
Kanazawa Inst. Technol. Ishikawa Jpn
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Kono Akihiko
Kanazawa Inst. Technol. Ishikawa Jpn
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Horibe Hideo
Kanazawa Institute Of Technology
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Yamamoto Masashi
Kanazawa Institute Of Technology
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KONO Akihiko
Kanazawa Institute of Technology
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Umemoto Hironobu
Shizuoka University, 3-5-1 Johoku, Naka, Hamamatsu 432-8561, Japan
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Horibe Hideo
Kanazawa Institute of Technology, 3-1 Yatsukaho, Hakusan, Ishikawa 924-0838, Japan
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Maruoka Takeshi
Kanazawa Institute of Technology, 3-1 Yatsukaho, Hakusan, Ishikawa 924-0838, Japan
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Kono Akihiko
Kanazawa Institute of Technology, 3-1 Yatsukaho, Hakusan, Ishikawa 924-0838, Japan
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Yamamoto Masashi
Kanazawa Institute of Technology, 3-1 Yatsukaho, Hakusan, Ishikawa 924-0838, Japan
著作論文
- Order of Reaction between Photoresist and Atomic Hydrogen Generated by a Tungsten Hot-Wire Catalyst
- Resist removal by using wet ozone
- Substrate Temperature Dependence of the Photoresist Removal Rate Using Atomic Hydrogen Generated by a Hot-Wire Tungsten Catalyst